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E17400 - SEMI E174 - Specification for Wafer Job Management (WJM) StdTpc-Silicon Materials & Process Control This Guide applies to virgin

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Description

This Guide applies to virgin HPIX resin as well as point of use HPIX modules intended for use in semiconductor manufacturing equipment and their ancillary equipment

SEMI D75-0118 (first published)

SEMI E5-1106E (editorial revision)

Message scenarios can also be documented to indicate the order and content of messages in a sequence

Clear and commonly accepted definitions are needed for efficient communication and to prevent misunderstanding between buyers and vendors of metrology equipment and manufacturing services

E17400 - SEMI E174 - Specification for Wafer Job Management (WJM) StdTpc-Silicon Materials & Process Control This Guide applies to virgin1 Purpose 1. 1 The purpose of this Standard is to provide a communication method which observes and or controls every single wafer (including its related information) on equipment individually (and independently rather than a member of a lot) through single management point from the host. 1. 2 The purpose of this Standard is to introduce Wafer Job (WJ) in order to observe and or control a wafer (and its information including context information from

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